Zobrazeno 1 - 10
of 38
pro vyhledávání: '"C. Küllig"'
Publikováno v:
Contributions to Plasma Physics. 55:728-736
This contribution presents results of comprehensive investigation of the E-H transition in an inductively coupled radio frequency argon/oxygen discharge at 13.56 MHz. For the characterization of the discharge arrangement, the spatial magnetic and ele
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::77a3dd20e1527b7c506cf26c70b42e8b
https://doi.org/10.1002/ctpp.201510018
https://doi.org/10.1002/ctpp.201510018
Autor:
Konstantin Matyash, I. Sheykin, Detlef Loffhagen, K. Dittmann, Ralf Schneider, Jürgen Meichsner, Th. Wegner, C. Küllig
Publikováno v:
Contributions to Plasma Physics. 52:836-846
The capacitively coupled radio frequency plasma at 13.56 MHz in oxygen was systematically studied by 160 GHz Gaussian beam microwave interferometry at high temporal resolution (200 ns) and simultaneous laser photodetachment for electron and negative
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3d83fa163e8c32d8be58c6fbdb12b977
https://doi.org/10.1002/ctpp.201200048
https://doi.org/10.1002/ctpp.201200048
Publikováno v:
Contributions to Plasma Physics. 52:561-570
Low pressure capacitively coupled radio frequency plasmas (cc-rf plasmas) were investigated by minimalinvasive 160 GHz Gaussian beam microwave interferometry. The interferometer is a frequency stabilized (PLL) heterodyne system which immediately prov
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5227e4b6622368e996ff1f5e2d5903b3
https://doi.org/10.1002/ctpp.201210052
https://doi.org/10.1002/ctpp.201210052
Publikováno v:
Plasma Sources Science and Technology
In this series of two papers, the E-H transition in a planar inductively coupled radio frequency discharge (13.56 MHz) in pure oxygen is studied using comprehensive plasma diagnostic methods. The electron density serves as the main plasma parameter t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1bd5c284cd19d7b014eb9c75f524fba2
https://doi.org/10.1088/1361-6595/26/2/025006
https://doi.org/10.1088/1361-6595/26/2/025006
Publikováno v:
Physics of Plasmas. 23:023503
This contribution presents experimental results about the mode transition of an inductively coupled radio frequency (RF) (13.56 MHz) argon discharge at different total gas pressures. In particular, the positive ion saturation current and the line int
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b7f6fba09e5cee0649a64f26ae0aff07
https://doi.org/10.1063/1.4941586
https://doi.org/10.1063/1.4941586
Publikováno v:
IEEE Transactions on Plasma Science. 42:2572-2573
Instabilities in an asymmetric capacitively coupled radio frequency argon discharge occur within the pressure range of 70-100 Pa while adding low amounts of CF 4 . The development of these instabilities is highly dynamic in time and space. The instab
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::395ba2d77a93d31cf05284d349a7da2c
https://doi.org/10.1109/tps.2014.2326524
https://doi.org/10.1109/tps.2014.2326524
Publikováno v:
IEEE Transactions on Plasma Science. 42:2830-2831
Optical excitation patterns and electron heating mechanisms were investigated in inductively coupled radio frequency oxygen discharges by phase and space resolved optical emission spectroscopy. Four excitation patterns due to different electron heati
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7debe545185bb2d03d99345a4bbc41e6
https://doi.org/10.1109/tps.2014.2310501
https://doi.org/10.1109/tps.2014.2310501
Publikováno v:
Plasma Sources Science and Technology. 24:044001
A planar inductively coupled RF discharge (13.56 MHz) in argon and oxygen was exemplarily studied using space and phase resolved optical emission spectroscopy. The characteristic excitation rate pattern due to the electron heating during the sheath e
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::460a4678cdee453bdd37a6c80c154f32
https://doi.org/10.1088/0963-0252/24/4/044001
https://doi.org/10.1088/0963-0252/24/4/044001
Publikováno v:
Physics of Plasmas. 22:043515
Periodic fluctuations in the frequency range from 0.3 to 3 kHz were experimentally investigated in capacitively coupled radio frequency (13.56 MHz) oxygen plasma. The Gaussian beam microwave interferometry directly provides the line integrated electr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::19b94eaa4b60c8f350988fc8a2717365
https://doi.org/10.1063/1.4918943
https://doi.org/10.1063/1.4918943
Publikováno v:
Plasma Sources Science and Technology. 24:015027
Axial and radial profiles of the positive ion saturation current were measured by Langmuir probe diagnostics in a capacitively coupled radio frequency (RF) plasma in argon and oxygen. Under certain conditions these profiles provide the spatial densit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::104089046a550e4e1d314a7e60cc150b
https://doi.org/10.1088/0963-0252/24/1/015027
https://doi.org/10.1088/0963-0252/24/1/015027