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pro vyhledávání: '"C. J. Beaumont"'
Autor:
Graeme D. Maxwell, Steven D. Hubbard, R. J. Powling, F. MacKenzie, C. J. Beaumont, P. J. Cannard
Publikováno v:
Optical Society of America Annual Meeting.
In the flame hydrolysis deposition technique, halides of Si, Ge, P, and B are introduced into an oxyhydrogen flame and hydolyzed to form oxide particles that are subsequently deposited on a silicon substrate. After deposition, the low density film pr