Zobrazeno 1 - 10
of 36
pro vyhledávání: '"C. G. Willson"'
Autor:
Frank Palmieri, Michael D. Stewart, Jeff Wetzel, Jianjun Hao, Yukio Nishimura, Kane Jen, Colm Flannery, Bin Li, Huang-Lin Chao, Soo Young, Woon C. Kim, Paul S. Ho, C. G. Willson
Publikováno v:
SPIE Proceedings.
The dual damascene process used to generate copper interconnects requires many difficult processing steps. Back End Of Line (BEOL) processing using Step and Flash Imprint Lithography (SFIL) on a directly patternable dielectric material can dramatical
Autor:
T. C. Bailey, M. Colburn, B. J. Choi, A. Grot, J. G. Ekerdt, S. V. Sreenivasan, C. G. Willson
Publikováno v:
Alternative Lithography ISBN: 9781461348368
A method of forming a relief image in a structure comprising a substrate and a transfer layer formed thereon comprises covering the transfer layer with a polymerizable fluid composition, and then contacting the polymerizable fluid composition with a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::78555383d5b3d9cee3dd1dda78733cb1
https://doi.org/10.1007/978-1-4419-9204-8_7
https://doi.org/10.1007/978-1-4419-9204-8_7
Publikováno v:
Volume 7B: 26th Biennial Mechanisms and Robotics Conference.
This paper presents design of partially constrained compliant stages for high-resolution (sub 100nm) imprint lithography machines. The kinematic designs of the stages allow passive alignment of two flat surfaces and enable shear-free separation. This
Autor:
C. T. Nelson, M Lin, Wei Wu, Li Tao, C G Willson, W. Hu, Seetharaman Ramachandran, Lawrence J. Overzet, Matthew Goeckner, Gil S. Lee
Publikováno v:
Nanotechnology. 19:105302
The interaction between resist and template during the separation process after nanoimprint lithography (NIL) can cause the formation of defects and damage to the templates and resist patterns. To alleviate these problems, fluorinated self-assembled
Publikováno v:
Optical Society of America Annual Meeting.
Newly emerging polymeric second order NLO materials have the potential to supplant inorganic crystals as the materials of choice for a variety of applications in modem optoelectronics technology, especially when high speed modulation and switching is
Publikováno v:
Langmuir; Jan2007, Vol. 23 Issue 3, p1166-1170, 5p
Publikováno v:
Canadian Journal of Chemistry. 63:153-162
It is shown that the tert-butyloxycarbonylation of phenols, alcohols, enols, and thiols can be accomplished by reaction of these functionalities with di-tert-butyl dicarbonate under phase transfer conditions. The reactions proceed in high yield and c
Publikováno v:
The Journal of Organic Chemistry. 45:1486-1489
Publikováno v:
Polymers for High Technology ISBN: 9780841214064
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::079929bd7a58d2f6731cad9f7f5c6920
https://doi.org/10.1021/bk-1987-0346.ch017
https://doi.org/10.1021/bk-1987-0346.ch017
Publikováno v:
Chemischer Informationsdienst. 11