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pro vyhledávání: '"C. G. Steele"'
Autor:
C. G. Steele, Thomas W. Ford, Jeffrey G. Duckett, J. A. Goode, Anton M. Page, Robin A. Cotton, Anthony D. Stead
Publikováno v:
SPIE Proceedings.
The use of laser-plasma generated soft x rays for contact microscopy offers several advantages over electron microscopy. After chemical development the exposed photoresist can be examined by interference light, scanning electron, or atomic force micr
Publikováno v:
Analytical Chemistry. 28:230-233