Zobrazeno 1 - 10
of 33
pro vyhledávání: '"C. Coutier"'
Publikováno v:
Sensors and Actuators A: Physical. 201:188-192
To mimic human mechanoreceptors and give sense of touch to robots highly integrated and highly sensitive three-axial force micro sensors are required. In this paper, we present the fabrication and electro-mechanical characterization of silicon based
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ffd2ac2001652856138309dddf617c3f
https://doi.org/10.1016/j.sna.2013.07.001
https://doi.org/10.1016/j.sna.2013.07.001
Autor:
F. Terry, Guillaume Jourdan, Audrey Berthelot, Philippe Robert, F. Blard, Patrice Rey, C. Coutier
Publikováno v:
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
This paper reports a resistor bridge made of two suspended piezoresistive silicon nanowires and shows that such a transduction system is particularly suitable for sensing mechanical motion in MEMS. Thanks to their small cross section, silicon nanogau
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::08524bec351cf887674208eaeed0da8b
https://doi.org/10.1109/transducers.2015.7181390
https://doi.org/10.1109/transducers.2015.7181390
Autor:
S. Nicolas, S. Fanget, X. Baillin, C. Coutier, G. Dehag, F. Souchon, C. Dressler, M. Audoin, F. Greco, S. Caplet
Publikováno v:
2014 IEEE 64th Electronic Components and Technology Conference (ECTC).
In this paper, our latest developments on high vacuum packaging technology at the wafer level are presented. The main objective of our works has been to demonstrate the feasibility of hermetic high vacuum wafer level packaging of MEMS (vacuum target
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::887763cc93ad02507e7269bac436e032
https://doi.org/10.1109/ectc.2014.6897528
https://doi.org/10.1109/ectc.2014.6897528
Publikováno v:
Optical Materials. 16:463-473
This paper reports on the first sol–gel thin film preparation of a new optically active compound: Er2Ti2O7 (ETO). Optical, microstructural and spectroscopic properties of ETO films annealed in a temperature range 300–1000°C are studied. This wor
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e8ee1789244fe65392e30a3ab6f576c2
https://doi.org/10.1016/s0925-3467(01)00007-6
https://doi.org/10.1016/s0925-3467(01)00007-6
Publikováno v:
Journal of Sol-Gel Science and Technology. 22:139-150
TiO2 sol-gel thin films have attracted a large attention for applications which require high refractive index transparent layers. In this work, sol-gel TiO2 layers were prepared by Aerosol-gel deposition followed by a thermal treatment procedure in a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c65f2e0302039aa0a9e68be9c68a2aea
https://doi.org/10.1023/a:1011232807842
https://doi.org/10.1023/a:1011232807842
Autor:
Philippe Robert, M. Cartier, C. Coutier, Frédéric Dumas-Bouchiat, M. Savoye, J. Delamare, Yuepeng Zhang, O. Redon, D. Ettelt, Nora Dempsey, M. Audoin, Patrice Rey, A. Walther
Publikováno v:
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.
We present for the first time a new concept for low-cost fabrication of a monolithic 3-axis MEMS compass using integrated permanent magnets and based on a technology compatible with inertial MEMS sensors. Piezoresistive gauges of nanometric scale ena
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::333ff117217637f0b744adc267bb9147
https://doi.org/10.1109/transducers.2011.5969128
https://doi.org/10.1109/transducers.2011.5969128
Publikováno v:
Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505).
Summary form only given. A lot of research has been done to limit parasitic effects linked to the high rare earth doping levels necessary for all-optical amplifiers or integrated lasers. One original solution consists in doping a glass matrix with na
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c2ed9c57f8454f4e8fbe3bb2a350242c
https://doi.org/10.1109/cleoe.2000.910055
https://doi.org/10.1109/cleoe.2000.910055
Publikováno v:
Journal of Aerosol Science. 29:S899-S900
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::709d2218a2b5ce608418a8109b5e49e6
https://doi.org/10.1016/s0021-8502(98)90632-2
https://doi.org/10.1016/s0021-8502(98)90632-2
Conference
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Conference
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