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Publikováno v:
Journal of The Electrochemical Society. 146:1505-1509
The surface quality of tribochemically polished silicon nitride was explored. Since a previous study has shown that chromic(VI) acid produces the best combination of polishing rate and surface quality, silicon nitride surfaces polished in 3 wt % chro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3d18ee6ea65815bcbba3ce60d27e2819
https://doi.org/10.1149/1.1391795
https://doi.org/10.1149/1.1391795
