Zobrazeno 1 - 10
of 76
pro vyhledávání: '"C, Word"'
Autor:
Karl Wimmer, Patrick J. LaCour, James C. Word, Kevin D. Lucas, Cesar M. Garza, Sergei V. Postnikov
Publikováno v:
SPIE Proceedings.
Due to the challenging CD control and resolution requirements of future device generations, a large number of complex lithography enhancement techniques are likely to be used for random logic devices. This increased design, reticle, process and OPC c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::30869c6d27b10ac0b3ff1b6804591d65
https://doi.org/10.1117/12.485263
https://doi.org/10.1117/12.485263
Autor:
Siuhua Zhu, James C. Word
Publikováno v:
SPIE Proceedings.
In recent years many of the problems associated with the use of assist features have been partially or completely resolved. Such issues include mask manufacturing and inspection, software maturity, and the so-called forbidden pitch problem. Still, th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4decd352ff3ef30950f7a40045e38010
https://doi.org/10.1117/12.485326
https://doi.org/10.1117/12.485326
Publikováno v:
SPIE Proceedings.
Patterning of small contact holes has arisen as one of the principal challenges in all of semiconductor lithography. It has been established that the wafer print CD of a contact is related to the effective area of the contact hole on the mask, and th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e432a73c1dab3f8ade44b62685a7ae44
https://doi.org/10.1117/12.485494
https://doi.org/10.1117/12.485494
Publikováno v:
SPIE Proceedings.
Photolithography on reflective surfaces with topography can cause exposure in unwanted areas, resulting in the phenomenon of reflective notching. Solutions to this problem are known within the industry, including the use of bottom anti-reflective coa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::76af92440517a90d7e5f08efe06a33d3
https://doi.org/10.1117/12.474566
https://doi.org/10.1117/12.474566
Publikováno v:
SPIE Proceedings.
At the 130 nm technology node with KrF illumination the k1 factor is only approximately 0.35. At k1 equals 0.35 it becomes essential to apply some form of Resolution Enhancement Technology (RET). The addition of sub-resolution assist features is one
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bbb0a206e5e67850a4e310b203351ffd
https://doi.org/10.1117/12.474494
https://doi.org/10.1117/12.474494
Autor:
null A Harding, null B Metting, null C Word, null G Bilyard, null G Hund, null J Amaya, null J Weber, null S Gajewski, null S Underriner, null T Peterson
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::80004a47894636edb5a57df1052ba600
https://doi.org/10.2172/2240
https://doi.org/10.2172/2240
Autor:
D L, Jones, K L, Irwin, J, Inciardi, B, Bowser, R, Schilling, C, Word, P, Evans, S, Faruque, H V, McCoy, B R, Edlin
Publikováno v:
Sexually transmitted diseases. 25(4)
Small ethnographic and clinic-based studies indicate that crack-smoking sex workers are at high risk for human immunodeficiency virus (HIV) and sexually transmitted diseases (STD).To examine the prevalence of risky sexual behaviors and HIV and STD in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::02c2ca4756f9af6ef7d331632bfa9efe
https://pubmed.ncbi.nlm.nih.gov/9564720
https://pubmed.ncbi.nlm.nih.gov/9564720
Publikováno v:
Smart Structures and Materials 1996: Smart Electronics and MEMS.
This work provides a method of mechanical alignment of an array of single mode fibers to an array of optical devices. The technique uses a micromachined metal spring, which captures a vertical, pre- positioned fiber, moves it into accurate alignment,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e1bf4f55ab0eb591187c13adbff78b99
https://doi.org/10.1117/12.240437
https://doi.org/10.1117/12.240437
Autor:
K L, Irwin, B R, Edlin, L, Wong, S, Faruque, H V, McCoy, C, Word, R, Schilling, C B, McCoy, P E, Evans, S D, Holmberg
Publikováno v:
Obstetrics and gynecology. 85(3)
To determine the prevalence of recent rape, the characteristics or recent rape survivors, and the seroprevalence of human immunodeficiency virus (HIV), syphilis, and genital herpes (HSV-2) among recent rape survivors.We surveyed women 18-29 years old
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::a5b88d3c8968682f810eb4effca73ffb
https://pubmed.ncbi.nlm.nih.gov/7862367
https://pubmed.ncbi.nlm.nih.gov/7862367
Autor:
B R, Edlin, K L, Irwin, S, Faruque, C B, McCoy, C, Word, Y, Serrano, J A, Inciardi, B P, Bowser, R F, Schilling, S D, Holmberg
Publikováno v:
The New England journal of medicine. 331(21)
The smoking of "crack" cocaine is thought to be associated with high-risk sexual practices that accelerate the spread of infection with the human immunodeficiency virus (HIV). We studied 2323 young adults, 18 to 29 years of age, who smoked crack regu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::814f121cb45ba681cc5b8d98ecf79902
https://pubmed.ncbi.nlm.nih.gov/7755770
https://pubmed.ncbi.nlm.nih.gov/7755770