Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Byoung Hun Leed"'
Autor:
Jeff J. Peterson, Gennadi Bersuker, Paul Kirsch, J.C. Lee, Siddarth A. Krishnan, Chadwin D. Young, Manuel Quevedo-Lopez, Hong-Jyh Li, Rino Choi, Byoung Hun Leed
Publikováno v:
2006 IEEE International Reliability Physics Symposium Proceedings.
The impact of nitrogen on charge trapping induced positive bias temperature instability (PBTI) characteristics in HfSiON/TiN gate stacks is investigated. While thickness is found to be the primary parameter to reduce charge trapping, plasma nitrogen
Autor:
Krishnan, S.A., Quevedo-Lopez, M., Hong-Jyh Li, Kirsch, P., Choi, R., Young, C., Peterson, J.J., Byoung Hun Leed, Bersuker, G., Lee, J.C.
Publikováno v:
2006 IEEE International Reliability Physics Symposium Proceedings; 2006, p325-328, 4p