Zobrazeno 1 - 5
of 5
pro vyhledávání: '"ByeongSoo Lee"'
Publikováno v:
Microelectronics Reliability. 138:114652
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d029c84e62845c7ffa726ad6f5f70769
https://doi.org/10.1016/j.microrel.2022.114652
https://doi.org/10.1016/j.microrel.2022.114652
Autor:
Arjan Holscher, Jeong-Heung Kong, Samah Khalek, Chansam Chang, Elliot Oti, Jong Hoon Jang, Hyunwoo Hwang, Roelof de Graaf, Young Ha Kim, Jeroen Cottaar, Young Seog Kang, Stefan Weichselbaum, Marcel Raas, Richard Droste, Ralf Gommers, YoungSun Nam, ByeongSoo Lee, Bram van Hoof, Jan van Kemenade, Maarten Voncken
Publikováno v:
SPIE Proceedings.
ASML’s 300mm scanner-systems are built on the TWINSCAN (XT/NXT) platform and yield high productivity levels for dry as well as immersion litho-scanners. NXT:1980Di immersion scanners yield productivity levels as high as 275wph while maintaining the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bd4101e7bdff4656fcb0929b34448e7c
https://doi.org/10.1117/12.2259794
https://doi.org/10.1117/12.2259794
Autor:
Wim de Boeij, Bart van Bussel, Young Ha Kim, Wim Bouman, Young Seog Kang, Roelof de Graaf, Jong Hoon Jang, AJ Arij Rijke, Chansam Chang, Richard Droste, Patrick Neefs, Jeong-Heung Kong, ByeongSoo Lee, Stefan Weichselbaum
Publikováno v:
SPIE Proceedings.
Adjustment and control of the illumination pupil asymmetry is relevant for wafer alignment and overlay of lithography tools. Pupil asymmetries can cause a tilt in aerial image (Aerial Image Tilt, or AIT). This AIT, combined with a focus offset, leads
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6d2a62cbae2bb86c11f34fa3481aaf32
https://doi.org/10.1117/12.2220588
https://doi.org/10.1117/12.2220588
Publikováno v:
SPIE Proceedings.
The amplitude setpoint affects the critical dimension measurement with CD-AFM. The setpoint amplitude is the amplitude of the resonant oscillation of the AFM tip maintained by the feedback loop as it scans the surface. The Setpoint therefore decides
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9c90137954ca8c4cb5871a924a4ab272
https://doi.org/10.1117/12.773230
https://doi.org/10.1117/12.773230
Autor:
Hong Jin Yoon, Jie-Hyun Kim, Byeongsoo Lee, Su Jung Baik, Jaeyoung Chun, Young Hoon Youn, Hyojin Park, Byoung Kwon Lee
Publikováno v:
Gut & Liver; Nov2019, Vol. 13 Issue 6(suppl. 1), p53-53, 1/4p