Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Burkhard Ludwig"'
Autor:
Rainer Pforr, Burkhard Ludwig, Mario Hennig, Nicolo Morgana, Marco Ahrens, Wolfgang Dettmann, Roderick Koehle, Joerg Thiele
Publikováno v:
SPIE Proceedings.
The lithographic potential of alternating PSM for sub-100nm gate patterning have been evaluated in comparison to alternative techniques. The status of the key elements of the full level alternating PSM approach including design conversion, optical pr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8622f94e193eb79e06258ce44fc43cb6
https://doi.org/10.1117/12.485521
https://doi.org/10.1117/12.485521
Autor:
Rainer Pforr, Molela Moukara, Marco Ahrens, Joerg Thiele, Mario Hennig, Michael Heissmeier, Wolfgang Dettmann, Burkhard Ludwig
Publikováno v:
SPIE Proceedings.
A study to partition a gate level design into an alternating phase shift mask and a chrome on glass trim mask is presented. After determination of important rules for the partitioning by simulation, all investigated gate level pattern could be partit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c2fca4f98cd80ccc3673f5758f2fd931
https://doi.org/10.1117/12.474639
https://doi.org/10.1117/12.474639