Zobrazeno 1 - 10
of 15
pro vyhledávání: '"Burkhard Kuhlmann"'
Publikováno v:
Proceedings, Vol 2, Iss 13, p 1029 (2018)
Encapsulation of MEMS accelerometers in vacuum is advantageous, since it allows integration with other sensors, leading to size and cost reduction. One technique to operate MEMS accelerometers in vacuum is the use of closed-loop Sigma-Delta modulatio
Externí odkaz:
https://doaj.org/article/b4d2e2c13fea435e952f3e3e574b9b9d
Publikováno v:
Proceedings, Vol 2, Iss 13, p 1030 (2018)
Resonant accelerometers are an alternative to amplitude modulated devices due to their higher integration capabilities, since they are encapsulated in vacuum and are stable at low pressures. Vacuum is required for some sensors (i.e., gyroscopes) but
Externí odkaz:
https://doaj.org/article/cbb30507176641a0a1dc4d1fa81f2c72
Autor:
Burkhard Kuhlmann, Eurico Esteves Moreira, Luís A. Rocha, Joao Gaspar, R.A. Dias, F. S. Alves, Jorge Cabral
Publikováno v:
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL).
Frequency modulated accelerometers composed of two double-ended tuning fork (DETF) resonators on a differential configuration were characterized for their sensitivity to force applied to their package. Commonly, differential architectures are employe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f99eba98a24b234c2a491ba8ef7a271a
https://doi.org/10.1109/inertial48129.2020.9090090
https://doi.org/10.1109/inertial48129.2020.9090090
A vacuum encapsulated MEMS accelerometer using Sigma-Delta modulation is here presented. Three different modulation orders (second, third, and fourth) were implemented in a field-programable gate array (FPGA), enabling flexibility for tuning the loop
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a1dc73bf4ad34a84b37a868342104703
https://hdl.handle.net/1822/71130
https://hdl.handle.net/1822/71130
Autor:
F. S. Alves, Joao Gaspar, Luís A. Rocha, R.A. Dias, Jorge Cabral, Burkhard Kuhlmann, Eurico Esteves Moreira
Publikováno v:
Repositório Científico de Acesso Aberto de Portugal
Repositório Científico de Acesso Aberto de Portugal (RCAAP)
instacron:RCAAP
Repositório Científico de Acesso Aberto de Portugal (RCAAP)
instacron:RCAAP
A single-axis resonant MEMS accelerometer is presented here. The goal is to achieve the maximum sensitivity on a set of predefined constraints: small footprint of 500 μm × 500 μm, vacuum operation under 150 Pa (requirement for a single-chip IMU) a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5fbb389ac6c02135eaeeb6266919e1d2
https://doi.org/10.1016/j.sna.2020.112005
https://doi.org/10.1016/j.sna.2020.112005
Publikováno v:
Proceedings, Vol 2, Iss 13, p 1030 (2018)
Resonant accelerometers are an alternative to amplitude modulated devices due to their higher integration capabilities, since they are encapsulated in vacuum and are stable at low pressures. Vacuum is required for some sensors (i.e., gyroscopes) but
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1717a29b9f6da61f4abced9b1f0b0bbe
https://doi.org/10.3390/proceedings2131030
https://doi.org/10.3390/proceedings2131030
Publikováno v:
2017 DGON Inertial Sensors and Systems (ISS).
This study reports on a method for parameter estimation of a randomly placed inertial measurement unit (IMU) on an excavator arm. Cost and time can be saved if the sensing equipment is self-calibrating and the mounting position is not a strict requir
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8a1f6f6e0ddc1eeb18bef7ebeb36d95c
https://doi.org/10.1109/inertialsensors.2017.8171504
https://doi.org/10.1109/inertialsensors.2017.8171504
Publikováno v:
2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL).
This paper reports on zero-rate noise contributions in a closed-loop MEMS vibratory gyroscope. In particular, we are investigating sources and composition of bias instability noise. This 1/f-noise is the dominant error component when integrating the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::24daa9931ba3ab7f5173ab1d64ec9e41
https://doi.org/10.1109/isiss.2017.7935674
https://doi.org/10.1109/isiss.2017.7935674
Autor:
Christoph Lang, Rainer Willig, Michael Veith, Ermin Esch, Burkhard Kuhlmann, Reinhard Neul, S. Gotz, Johannes Classen, C. Doring, Joerg Hauer, Udo-Martin Gomez, Kersten Kehr, Wolfram Bauer
Publikováno v:
IEEE Sensors Journal. 7:302-309
Micromachined angular rate sensors are key elements in several automotive systems, thus enabling highly sophisticated applications like rollover detection and mitigation, navigation systems, electronic stability program, and other future vehicle stab
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::63170578a6a371eaec5260870f5a8dff
https://doi.org/10.1109/jsen.2006.888610
https://doi.org/10.1109/jsen.2006.888610
Publikováno v:
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).
The working frequency f 0 of vibratory MEMS angular rate sensors is a main optimization parameter. To investigate the specific challenges of increasing f 0 we designed a new device with f 0 =100 kHz. Key parameters of the 100 kHz device are theoretic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::77a9242225fd8077f6975f23da55a794
https://doi.org/10.1109/memsys.2012.6170245
https://doi.org/10.1109/memsys.2012.6170245