Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Bulk Acoustic Resonator (BAR)"'
Publikováno v:
Micromachines, Vol 12, Iss 9, p 1039 (2021)
This paper proposed a solid-mounted (SM) longitudinally excited shear wave resonator (i.e., YBAR). By adopting a 200 nm x-cut LiNbO3 film, top (aluminum) and bottom (platinum) electrodes in 50 nm thickness and 500 nm width, this resonator simultaneou
Externí odkaz:
https://doaj.org/article/3461b18abe7845d08a13f3fd863270d2
Publikováno v:
Micromachines
Micromachines, Vol 12, Iss 1039, p 1039 (2021)
Volume 12
Issue 9
Micromachines, Vol 12, Iss 1039, p 1039 (2021)
Volume 12
Issue 9
This paper proposed a solid-mounted (SM) longitudinally excited shear wave resonator (i.e., YBAR). By adopting a 200 nm x-cut LiNbO3 film, top (aluminum) and bottom (platinum) electrodes in 50 nm thickness and 500 nm width, this resonator simultaneou
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0b93ea074e62cc6d9d8c8bee2489ce76
http://europepmc.org/articles/PMC8467399
http://europepmc.org/articles/PMC8467399
Autor:
Hughes, William L.
Union between top-down and bottom-up assembly is inevitable when scaling down physical, chemical, and biological sensors and probes. Current sensor/probe-based technologies are firmly founded on top-down manufacturing, with limitations in cost of pro
Externí odkaz:
http://hdl.handle.net/1853/13954
Akademický článek
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