Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Bruce J. Redder"'
Autor:
John Sylvestri, Larry Fischer, Sweta Pendyala, Scott Dinkel, T. Kane, S.B. Ippolito, Rich Oldrey, Manuel Villalobos, Bruce J. Redder, Michael P. Tenney, Pat McGinnis, Darrell L. Miles
Publikováno v:
International Symposium for Testing and Failure Analysis.
This paper describes novel concepts in equipment and measurement techniques that integrate optical electrical microscopy and scanning probe microscopy (SPM) capabilities into a single tool under the umbrella of optical nanoprobe electrical (ONE) micr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7d99ae7facc8c5b65889803e1b0bd886
https://doi.org/10.31399/asm.cp.istfa2013p0208
https://doi.org/10.31399/asm.cp.istfa2013p0208
Publikováno v:
International Symposium for Testing and Failure Analysis.
The continually shrinking dimensions of today’s semiconductor technology occasionally allow for novel approaches in imaging defects. It has become desirable to image subsurface voids prior to cross sectioning and some efforts have been made to addr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f011ce72dccbc91e8c62cb60052be3f9
https://doi.org/10.31399/asm.cp.istfa2007p0103
https://doi.org/10.31399/asm.cp.istfa2007p0103