Chemistry and aging of organosiloxane and fluorocarbon films grown from hyperthermal polyatomic ions.

Autor: Hanley, Luke, Fuoco, Erick, Wijesundara, Muthu B. J., Beck, Alison J., Brookes, Pat N., Short, Robert D.

Publikováno v: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2001, Vol. 19 Issue 4, p1531-1536, 6p