Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Broens, Yorick"'
Growing demands in the semiconductor industry necessitate increasingly stringent requirements on throughput and positioning accuracy of lithographic equipment. Meeting these demands involves employing highly aggressive motion profiles, which introduc
Externí odkaz:
http://arxiv.org/abs/2408.03642
Motion systems are a vital part of many industrial processes. However, meeting the increasingly stringent demands of these systems, especially concerning precision and throughput, requires novel control design methods that can go beyond the capabilit
Externí odkaz:
http://arxiv.org/abs/2403.05878
Growing demands in today's industry results in increasingly stringent performance and throughput specifications. For accurate positioning of high-precision motion systems, feedforward control plays a crucial role. Nonetheless, conventional model-base
Externí odkaz:
http://arxiv.org/abs/2303.14402
The demand for high-precision and high-throughput motion control systems has increased significantly in recent years. The use of moving-magnet planar actuators (MMPAs) is gaining popularity due to their advantageous characteristics, such as complete
Externí odkaz:
http://arxiv.org/abs/2303.14392
The ever increasing need for performance results in increasingly rigorous demands on throughput and positioning accuracy of high-precision motion systems, which often suffer from position dependent effects that originate from relative actuation and s
Externí odkaz:
http://arxiv.org/abs/2209.06554
Increasingly stringent throughput requirements in the industry necessitate the need for lightweight design of high-precision motion systems to allow for high accelerations, while still achieving accurate positioning of the moving-body. The presence o
Externí odkaz:
http://arxiv.org/abs/2203.08287
In recent years, the Linear Parameter-Varying (LPV) framework has become increasingly useful for analysis and control of time-varying systems. Generally, LPV control synthesis is performed in the continuous-time (CT) domain due to significantly more
Externí odkaz:
http://arxiv.org/abs/2202.03177
Growing demands in the semiconductor industry result in the need for enhanced performance of lithographic equipment. However, position tracking accuracy of high precision mechatronics is often limited by the presence of disturbance sources, which ori
Externí odkaz:
http://arxiv.org/abs/2105.01458
Publikováno v:
arXiv, 2022:2209.06554. Cornell University Library
The ever increasing need for performance results in increasingly rigorous demands on throughput and positioning accuracy of high-precision motion systems, which often suffer from position dependent effects that originate from relative actuation and s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::95fe75b4af443981c8580b3b4a7ce08f
https://doi.org/10.1109/cdc51059.2022.9993406
https://doi.org/10.1109/cdc51059.2022.9993406
