Microstructure evolution of gold thin films under spherical indentation for micro switch contact applications

Autor: Karim Inal, Vincent Mandrillon, Christophe Poulain, Brice Arrazat, Maxime Vincent

Publikováno v: Journal of Materials Science. 46:6111-6117

RF MEMS (Radio Frequency Micro Electro Mechanical System) switches are promising devices but their gold-on-gold contacts, assimilated for this study to a sphere/plane contact, represent a major reliability issue. A first step toward understanding fai

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::d4dbcf85d14d386e7e6d45ee46e9dd04
https://doi.org/10.1007/s10853-011-5575-8

Robust design of thermo-mechanical MEMS switch embedded in aluminium BEOL interconnect

Autor: Brice Arrazat, Sylvain Blayac, Pascal Fornara, Sebastian Orellana, Pierre Montmitonnet, Karim Inal, Christian Rivero

Publikováno v: Microelectronics Reliability
Microelectronics Reliability, Elsevier, 2015, Proceedings of the 26th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis-Proceedings of ESREF 2015, 55 (9-10), pp.1896-1900. ⟨10.1016/j.microrel.2015.06.032⟩

International audience; A new concept of a thermo-mechanical lateral switch activation is proposed. Embedded in standard aluminium BEOL (Back End Of Line), it is fully integrated in CMOS technology. The simplicity of this low cost one-mask fabricatio

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a12ece74956bffc8363f2efa5389f83a
https://hal-mines-paristech.archives-ouvertes.fr/hal-01180626

Improvement of freestanding CMOS-MEMS through detailed stress analysis in metallic layers

Autor: Sylvain Blayac, Karim Inal, S. Orellana, Christian Rivero, Brice Arrazat, Pierre Montmitonnet, A. Di Giacomo, Pascal Fornara

Publikováno v: Thermal, mechanical and multi-physics simulation and experiments in microelectronics and microsystems-EuroSimE 2014
15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2014
15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2014, Apr 2014, Ghent, Belgium. 6 p.-ISBN 978-1-4799-4791-1, ⟨10.1109/EuroSimE.2014.6813834⟩

International audience; A freestanding cross-shaped structure designed as a planar rotation stress sensor [1], [2], [3] is manufactured using standard CMOS technology (Complementary Metal-Oxide-Semiconductor). The fabrication process induces thermal

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7e2dcb87e0d9ec5d7fcad9ca62c4f109
https://doi.org/10.1109/eurosime.2014.6813834

INVESTIGATION OF BORON AND NITROGEN ION BEAM IMPLANTATION IN GOLD THIN FILMS FOR OHMIC MEMS SWITCH CONTACT IMPROVEMENT

Autor: P. Gergaud, K. Inal, Brice Arrazat

Publikováno v: Proceedings of Tansducers 2013 and Eurosensors XXVII
Tansducers and Eurosensors XXVII
Tansducers and Eurosensors XXVII, Jun 2013, Barcelona, Spain

International audience; Contact material and more precisely surface properties are a major issue for RF MEMS ohmic switch reliability. Shallow ion implantation of boron and nitrogen on gold thin film is investigated to increase surface hardness with

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::215b959444da59b1a77e87233caa8bef
https://hal-emse.ccsd.cnrs.fr/emse-00840099/file/Arrazat_Transducers2013.pdf

Discrete Analysis of Gold Surface Asperities Deformation under Spherical Nano-Indentation Towards Electrical Contact Resistance Calculation

Autor: Brice Arrazat, Vincent Mandrillon, Karim Inal, Pierre-Yves Duvivier

Publikováno v: 2011 IEEE 57th Holm Conference on Electrical Contacts (Holm).

MEMS ohmic switches have demonstrated interesting performances due in part to their low contact resistance which depends on multiple contributions, one amongst them is the roughness of the contact area. In fact, the contact area is composed by cluste

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::da561044e3aec04860a397d15b5220f0
https://doi.org/10.1109/holm.2011.6034798