Zobrazeno 1 - 2
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pro vyhledávání: '"Brian John Machesney"'
Publikováno v:
Journal of Materials Research. 8:467-472
Cobalt (Co)/silicon dioxide (SiO2) reactions during rapid thermal annealing (RTA) in an N2 ambient have been investigated. Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) show that islands consisting of Co and the cobalt
Publikováno v:
1991 IEEE International SOI Conference Proceedings.
Various factors for determining body doping for a high performance 0.1- mu m SOI (silicon-on-insulator) MOSFET technology are considered. Long channel constraints on body doping and thickness for assuring full depletion are treated first. Then short