Zobrazeno 1 - 10
of 16
pro vyhledávání: '"Brian G. Rennex"'
Publikováno v:
Solid-State Electronics. 47:1589-1596
We present a model for simulating the capacitance–voltage ( C – V ) characteristics of polysilicon-gated MOS devices with thin oxides. The model includes substrate quantization effects through a modification of the total semiconductor charge. The
Publikováno v:
Journal of The Electrochemical Society. 143:258-263
The methodology and experiment for certification of reference specimens for determining interstitial oxygen concentration in semiconductor silicon are reported. These reference specimens are intended for calibration of infrared spectrophotometers whi
Publikováno v:
AIP Conference Proceedings.
FASTC2D is a Windows based computer program for conversion of two-dimensional (2D) scanning capacitance microscope (SCM) images of doped silicon into 2D carrier profiles. It utilizes interactive, user-friendly software to allow a user to enter electr
Publikováno v:
The 1998 international conference on characterization and metrology for ULSI technology.
Scanning capacitance microscope (SCM) image contrast measured on ion implanted P+/P and P+/N junction structures with identical dopant profiles, as a function of SCM operating conditions, is compared to a theoretical model of the SCM based on a two-d
Autor:
Wilfried Vandervorst, Yufei Li, Diana L. Ottaviani, Douglas J. Thomson, D. Venables, Jochonia N. Nxumalo, Joseph J. Kopanski, Mi-Chang Chang, J. S. McMurray, Clayton C. Williams, Hal Edwards, Suneeta S. Neogi, Jay F. Marchiando, Charles F. Machala, Richard San Martin, Vladimir A. Ukraintsev, R. Scott List, Peter De Wolf, Brian G. Rennex, V. V. Zavyalov
Publikováno v:
The 1998 international conference on characterization and metrology for ULSI technology.
The lack of a two-dimensional (2D) dopant standard and hence a priori knowledge of dopant distribution makes it impossible to unambiguously judge accuracy of any experimental or theoretical effort to characterize silicon doping in two-dimensions. Rec
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 20:2101
The accuracy with which two-dimensional carrier profiles can be extracted from scanning capacitance microscopy (SCM) images of doped structures in silicon depends on the model used to interpret the SCM differential capacitance data. This work validat
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 18:409
Scanning capacitance microscopy (SCM) was used to image (1) boron dopant gradients in p-type silicon and (2) identical boron dopant gradients in n-type silicon. The bias voltage dependence of the apparent p–n junction location in the (SCM) images w
Autor:
Brian G. Rennex
Publikováno v:
Journal of Thermal Insulation. 3:37-61
Approximate expressions are obtained for the apparent ther mal conductivity and thermal resistance, in the case of combined conduc tive and radiative heat transfer through low-density insulation. These ex pressions are obtained in the regimes of inte
Autor:
Brian G. Rennex
Publikováno v:
Journal of Thermal Insulation. 7:18-51
An error analysis is given for the 1-meter Guarded Hot Plate at the National Bureau of Standards. This apparatus is used to measure the thermal resistance of insulation materials. The individual contributions to uncertainty in thermal resistance are