Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Brett Baker O'Neal"'
Autor:
Qiang Huang, John Dukovic, Sunny Chiang, Xiaoyan Shao, James J. Kelly, O. van der Straten, Brett Baker O'Neal, Tuan Vo
Publikováno v:
ECS Meeting Abstracts. :1897-1897
The morphology of thin layers of Cu electrodeposited on 300 mm Ru substrates (deposited by plasma enhanced atomic layer deposition or PEALD) is studied. To reduce the terminal effect, a layer of physical vapor deposited (PVD) Cu is employed beneath t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::41f49a071db6e7a32a18980b14d3b6f3
https://doi.org/10.1149/ma2008-02/24/1897
https://doi.org/10.1149/ma2008-02/24/1897
