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pro vyhledávání: '"Brennen K"'
Akademický článek
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Autor:
R. Paxton Thedford, C. Grant Willson, Paul A. Kohl, Brennen K. Mueller, William K. Bell, Philip Liu, Colin O. Hayes, Jared M. Schwartz
Publikováno v:
Journal of the Ceramic Society of Japan. 123:800-804
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e0a4b7ff7b22a854b0553c05a7c76e7a
https://doi.org/10.2109/jcersj2.123.800
https://doi.org/10.2109/jcersj2.123.800
Publikováno v:
ECS Journal of Solid State Science and Technology. 4:N6-N12
The mechanical properties of an aqueous developed, chemically amplified, polynorbornene-based permanent dielectric have been investigated. The previously reported hexafluoroisopropanol norbornene and tert-butyl ester norbornene copolymer has been mod
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2ef92b79709d8cc64ad24c82c5338b31
https://doi.org/10.1149/2.0161502jss
https://doi.org/10.1149/2.0161502jss
Autor:
Angelica M. Grillo, Brennen K. Mueller, Jared M. Schwartz, Zachary D. Pritchard, Paul A. Kohl, Sang Y. Lee, Helen W. Li, Edmund Elce
Publikováno v:
ECS Journal of Solid State Science and Technology. 4:N3008-N3014
The processing and properties of a positive-tone, aqueous develop, epoxy crosslinked permanent dielectric based on a polynorbornene (PNB) backbone and bis(diazonaphthoquinone) (DNQ) photosensitive compound were investigated. The developing and cure p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::db476c28c402ab9372ad4edcb1da58f7
https://doi.org/10.1149/2.0021501jss
https://doi.org/10.1149/2.0021501jss
Autor:
Jared M. Schwartz, Brennen K. Mueller, Edmund Elce, Alexandra Sutlief, Paul A. Kohl, C. Grant Willson, Colin O. Hayes, William K. Bell
Publikováno v:
ECS Journal of Solid State Science and Technology. 4:N3001-N3007
A low permittivity, positive tone, polynorbornene dielectric has been developed that exhibits excellent lithographic and electrical properties. The polymer resin is a random copolymer of a norbornene hexafluoroalcohol (NBHFA) and a norbornene tert-bu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9857e2cf2fdba5bac73fee1632f103c6
https://doi.org/10.1149/2.0011501jss
https://doi.org/10.1149/2.0011501jss
Publikováno v:
ECS Transactions. 61:243-251
Research in microelectronics packaging has recently been driven by the reduction in size of the die the package contains. Die-die, interconnect-interconnect, and substrate-die distances are rapidly decreasing in size. As the electronic system shrinks
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::72050c2f01edfeba640f7f4462c48123
https://doi.org/10.1149/06103.0243ecst
https://doi.org/10.1149/06103.0243ecst
Publikováno v:
ECS Transactions. 61:227-235
Permanent dielectric materials are necessary in microelectronic devices to separate electronic components. Low dielectric constant (low-k) materials mechanically and electrically isolate on-chip, chip-to-chip, chip-to-package, or on-package interconn
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ae8dc0f3c5697240ea0a334815c605c7
https://doi.org/10.1149/06103.0227ecst
https://doi.org/10.1149/06103.0227ecst
Autor:
Paul A. Kohl, Brennen K. Mueller
Publikováno v:
Journal of Applied Polymer Science. 130:759-765
A new class of positive tone, permanent materials has been demonstrated, which are chemically amplified (CA), aqueous- developable, and cross-linkable. The intended purpose is a patterning and cross-linking method to create high sensitivity permanent
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::933295f076dd89b9221e24be4a885cc0
https://doi.org/10.1002/app.39225
https://doi.org/10.1002/app.39225
Autor:
Leon M. Dean, Brennen K. Mueller, Jeffrey R. Strahan, Christopher J. Ellison, Paul F. Nealey, Marco A. Bedolla Pantoja, Christopher M. Bates, C. Grant Willson
Publikováno v:
Journal of Polymer Science Part A: Polymer Chemistry. 51:290-297
The successful synthesis, characterization, and directed self-assembly of a silicon-containing block copolymer, poly(styrene-block-trimethylsilylisoprene) (P(S-b-TMSI)), which has much higher oxygen etch contrast than the de facto standard, poly(styr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::83046b4c90132d2cc11dba0bf5433d90
https://doi.org/10.1002/pola.26375
https://doi.org/10.1002/pola.26375
Publikováno v:
Journal of Applied Polymer Science. 127:4653-4661
A positive-tone, aqueous base soluble, polynorbornene (PNB) dielectric formulation has been developed. The photolitho- graphic solubility switching mechanism is based on diazonaphthoquinone (DNQ) inhibition of PNB resin functionalized with pend- ent
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fdbc57cd35dd4696d823a87a8c60f6f7
https://doi.org/10.1002/app.38055
https://doi.org/10.1002/app.38055