Zobrazeno 1 - 10
of 16
pro vyhledávání: '"Brennan M. Coffey"'
Publikováno v:
Journal of Vacuum Science & Technology A. 41:032402
Here, we propose SnO2 as a reactive ion etching (RIE) mask in fluorine-based etching processes. Tin forms nonvolatile compounds with fluorine at the process temperatures enabling tin to function as an etch mask. We investigate atomic layer deposition
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::128fc7b4f37e23872240e80129f65f1d
https://doi.org/10.1116/6.0002429
https://doi.org/10.1116/6.0002429
Publikováno v:
Chemistry of Materials. 32:6035-6042
Low-temperature, plasma-free atomic layer etching (ALE) of Pd0 is explored. A vacuum ultraviolet (VUV) light source (115 < λ < 400 nm) is used in conjunction with a controlled O2 gas exposure to pr...
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b422114af19c61406950d64723380c6c
https://doi.org/10.1021/acs.chemmater.0c01379
https://doi.org/10.1021/acs.chemmater.0c01379
Publikováno v:
Journal of Vacuum Science & Technology A. 40:062406
Nickel and nickel oxide are utilized within various device heterostructures for chemical sensing, solar cells, batteries, etc. Recently, the rising interest in realizing low-cost, flexible electronics to enable ubiquitous sensors and solar panels, ne
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::14d8cc8b2c093f4b1a1b511a3fef6edc
https://doi.org/10.1116/6.0002068
https://doi.org/10.1116/6.0002068
Publikováno v:
Chemistry of Materials. 31:5558-5565
Patterned, crystalline BaTiO3 (BTO) films were formed directly on STO(001) surfaces using atomic layer deposition and restricting Ba and Ti precursor adsorption to STO(001) by passivating regions of the substrate with a polystyrene blocking layer. Pa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cdd7f1df8d473f0c79fb5cb6863ad799
https://doi.org/10.1021/acs.chemmater.9b01271
https://doi.org/10.1021/acs.chemmater.9b01271
Publikováno v:
ACS applied materialsinterfaces. 12(45)
Density functional theory (DFT) is used to better understand the oxidation of Pd metal using vacuum ultraviolet (VUV) light co-exposed with O2, which is known to produce O and O3. The oxidation of Pd metal arising from O, O2, and O3 is assessed on ba
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b146d368388ec3445e31845b3b96fff3
https://pubmed.ncbi.nlm.nih.gov/33119248
https://pubmed.ncbi.nlm.nih.gov/33119248
Publikováno v:
Journal of Vacuum Science & Technology A. 39:012601
Vacuum ultraviolet (VUV) enhanced atomic layer etching (ALE) of thin (∼8 nm) Ru films is demonstrated. Oxidation half-cycles of 2–5 min VUV/O2 co-exposure are used to oxidize near-surface Ru to RuO2 at 1 Torr O2 and 100–150 °C. In situ x-ray p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::85db91484416faddf81f19e3ab36ed68
https://doi.org/10.1116/6.0000742
https://doi.org/10.1116/6.0000742
Autor:
Davis J. Smith, Pei-Yu Chen, Agham Posadas, Brennan M. Coffey, Keji Lai, Lu Zheng, Alexander A. Demkov, HsinWei Wu, Edward L. Lin, John G. Ekerdt
Publikováno v:
Journal of Vacuum Science & Technology A. 38:022403
BaTiO3 (BTO) and LaxSr1 − xTiO3 (x ≤ 0.15) perovskite heterostructures are deposited epitaxially on SrTiO3 (STO)-buffered Si(001) via atomic layer deposition (ALD) to explore the formation of a quantum metal layer between a ferroelectric film and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::697dd26d7852b857f5e568a9c5407f33
https://doi.org/10.1116/1.5134077
https://doi.org/10.1116/1.5134077
Autor:
Zizhuo Zhang, Himamshu C. Nallan, Tanmoy Pramanik, Sanjay K. Banerjee, Brennan M. Coffey, Thong Q. Ngo, John G. Ekerdt
Publikováno v:
Journal of Vacuum Science & Technology A. 37:010903
The authors report the deposition of 4.5-nm-thick cobalt (II) oxide on SiO2/Si(001) and MgO(001) substrates at 180–270 °C by atomic layer deposition using bis(N-tert-butyl-N′-ethylpropionamidinato) cobalt (II) and water as coreactants. The resul
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0f2875bebd660a9945f05131c5983ca3
https://doi.org/10.1116/1.5063669
https://doi.org/10.1116/1.5063669
Publikováno v:
ACS applied materialsinterfaces. 5(24)
Many fields of research have adopted self-assembly of colloidal spheres as an easy and reliable method to produce macroscopic structures with nanoscale periodicity. The field of soft lithography in particular has used colloidal self-assembly to fabri
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::58851618b556d22799b788d8a0b1a562
https://pubmed.ncbi.nlm.nih.gov/24274697
https://pubmed.ncbi.nlm.nih.gov/24274697
Publikováno v:
ChemInform. 35
The influence of Bi- or Ba-containing compounds on the rechargeability of γ-MnO 2 in alkaline electrolytes has been investigated with AA cells containing cylindrical cathodes and flooded cells containing thin-film type cathodes. In addition to the e
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cde90a27fd79f1839202e7e99d025278
https://doi.org/10.1002/chin.200409012
https://doi.org/10.1002/chin.200409012