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Autor:
Herr, Anna, Herr, Quentin, Brebels, Steve, Kim, Min-Soo, Pokhrel, Ankit, Hodges, Blake, Josephsen, Trent, ONeal, Sabine, Bai, Ruiheng, Nowack, Katja, Valente-Feliciano, Anne-Marie, Tökei, Zsolt
We describe a fabrication stackup for digital logic with 16 superconducting NbTiN layers, self-shunted a-silicon barrier Josephson Junctions (JJs), and low loss, high-$\kappa$ tunable HZO capacitors. The stack enables 400 MJJ/cm$^2$ device density, e
Externí odkaz:
http://arxiv.org/abs/2303.16792