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pro vyhledávání: '"Bradley N. Damazo"'
Autor:
Bradley N. Damazo, András E. Vladár
Publikováno v:
Microscopy and Microanalysis. 25:244-245
Publikováno v:
SPIE Proceedings.
The future of our nation hinges on our ability to prepare our next generation to be innovators in science, technology, engineering and math (STEM). Excitement for STEM must begin at the earliest stages of our education process. Yet, today far too few
Publikováno v:
SPIE Proceedings.
A novel through-focus scanning optical microscopy (TSOM) method that yields nanoscale information from optical images obtained at multiple focal planes will be used here for nanoparticle dimensional analysis. The TSOM method can distinguish not only
Autor:
Eranga C. Jayewardene, Michael T. Postek, Bradley N. Damazo, András E. Vladár, William J. Keery
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XVIII.
The National Institute of Standards and Technology (NIST) has implemented a high bandwidth laser interferometer measurement system in a specialized metrology microscope. The purpose of the system is the certification of SEM magnification calibration
Autor:
Theodore V. Vorburger, Clayton Teague, John Song, Nicholas G. Dagalakis, E Amatucci, John Evans, Bradley N. Damazo, Matthew A. Davies
Publikováno v:
Nanotribology ISBN: 9781461353560
The future of nano-, micro- and meso-scale manufacturing operations will be strongly influenced by a new breed of assembly and manufacturing tools that will be intelligent, flexible, more precise, include in-process production technologies and make u
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f05925d42bdb1340e7bd9bdb03de09bb
https://doi.org/10.1007/978-1-4615-1023-9_21
https://doi.org/10.1007/978-1-4615-1023-9_21
Autor:
Bradley N. Damazo, Michael T. Postek, Eranga C. Jayewardene, William J. Keery, András E. Vladár
Publikováno v:
SPIE Proceedings.
The National Institute of Standards and Technology (NIST) has provided industry with a scanning electron microscope (SEM) magnification calibration sample Reference Material (RM) 8090. The certified, Standard Reference Material (SRM) version, SRM 209
Autor:
Michael T. Postek, András E. Vladár, Alice V. Ling, Bradley N. Damazo, Eranga C. Jayewardene, M. Alkan Donmez
Publikováno v:
SPIE Proceedings.
This paper describes the design and implementation of a system for monitoring the performance of several major subsystems of a critical dimension measurement scanning electron microscope (CD-SEM). Experiments were performed for tests involving diagno
Publikováno v:
International Journal of Mechatronics and Manufacturing Systems. 2:600
The small work volumes of Micro/Meso-scale Machine Tools (MMMTs) often present problems for calibration and error compensation, but also allow solutions not practical on the traditional scale. Measuring tool position with a separate metrology frame a
Autor:
H. Zou, Bradley N. Damazo, Satoshi Gonda, Carsten P. Jensen, Richard M. Silver, Jau-Shi Jay Jun, Lowell P. Howard
Publikováno v:
Optical Engineering. 43:79
We develop a new implementation of a Michelson interferometer designed to make measurements with an uncertainty of less than 20 pm. This new method uses a tunable diode laser as the light source, with the diode laser wavelength continuously tuned to