Zobrazeno 1 - 10
of 55
pro vyhledávání: '"Brünger, W.H."'
Publikováno v:
In Surface & Coatings Technology 2007 201(19):8437-8441
Publikováno v:
In Microelectronic Engineering 2003 67:175-181
Autor:
Merhari, L ∗, Gonsalves, K.E, Hu, Y, He, W, Huang, W.-S, Angelopoulos, M, Bruenger, W.H, Dzionk, C, Torkler, M
Publikováno v:
In Microelectronic Engineering 2002 63(4):391-403
Publikováno v:
In Microelectronic Engineering 2002 61:295-300
Autor:
Milne, W.I., Teo, K.B.K., Chhowalla, M., Amaratunga, G.A., Yuan, J., Robertson, J., Legagneux, P., Pirio, G., Pribat, D., Bouzehouane, K., Brünger, W.H., Trautmann, C.
The overall aim of this work is to produce a parallel e-beam lithography system using an array of field-emitting microguns independently driven by an active matrix array. This paper will describe the work carried out on optimisation of suitable carbo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od_______610::252c49c2288ca28154f0c46dff9a194a
https://publica.fraunhofer.de/handle/publica/200358
https://publica.fraunhofer.de/handle/publica/200358
Autor:
Szmanda, C.S., Brainard, R.L., Mackevich, J.F., Awaji, A., Tanaka, T., Yamada, Y., Bohland, J., Tedesco, S., Dal'Zotto, B., Brünger, W.H., Torkler, M., Fallmann, W., Löschner, H., Käsmaier, R., Nealey, P.M., Pawloski, A.R.
A method for measuring acid generation efficiency is presented and utilized to determine the relative efficiency of four photoacid generators (PAGs) upon radiation with photon, electron, and ion beams. In this method, chemically amplified resists are
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od_______610::4a3cce690e34a78fd29ad0d1ad0aa756
https://publica.fraunhofer.de/handle/publica/195365
https://publica.fraunhofer.de/handle/publica/195365
Damage in thin (10 nm) oxide layers of metal-oxide-semiconductor varactor cells caused by exposures with ions, electrons, and X-rays has been electrically characterized by constant-current stress time-dependent dielectric breakdown and capacitance-vo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od_______610::02ecfc96d6a43ac24338ab228338de24
https://publica.fraunhofer.de/handle/publica/186015
https://publica.fraunhofer.de/handle/publica/186015