Zobrazeno 1 - 10
of 22
pro vyhledávání: '"Borjon, Amandine"'
Autor:
Gardin, Christian, Belledent, Jérôme, Trouiller, Yorick, Borjon, Amandine, Couderc, Christophe, Foussadier, Franck, Yesilada, Emek, Urbani, Jean-Christophe, Sundermann, Frank, Rody, Yves, Saied, Mazen, Planchot, Jonathan, Robert, Frederic
Publikováno v:
In Microelectronic Engineering 2007 84(5):770-773
Autor:
Borjon, Amandine, Belledent, Jérôme, Trouiller, Yorick, Gardin, Christian, Couderc, Christophe, Rody, Yves, Sundermann, Frank, Urbani, Jean-Christophe, Foussadier, Franck, Planchot, Jonathan, Yesilada, Emek, Montgomery, Patrick, Willkinson, Bill, Saied, Mazen, Martinelli, Catherine, Kerrien, Gurwan, Cam, Laurent Le, Vautrin, Florent, Robert, Frédéric, Schiavone, Patrick
Publikováno v:
In Microelectronic Engineering 2007 84(5):741-745
Autor:
Borjon, Amandine, Belledent, Jérôme, Trouiller, Yorick, Patterson, Kyle, Lucas, Kevin, Gardin, Christian, Couderc, Christophe, Rody, Yves, Sundermann, Frank, Urbani, Jean-Christophe, Baron, Stanislas, Foussadier, Frank, Schiavone, Patrick
Publikováno v:
In Microelectronic Engineering 2006 83(4):1017-1022
Autor:
Borjon, Amandine, Belledent, Jerôme, Trouiller, Yorick, Patterson, Kyle, Lucas, Kevin, Couderc, Christophe, Sundermann, Frank, Urbani, Jean-Christophe, Baron, Stanislas, Rody, Yves, Gardin, Christian, Foussadier, Frank, Schiavone, Patrick
Publikováno v:
Proc. SPIE vol. 5992, 25th Annual BACUS Symposium on Photomask Technology
Ensuring robust patterning after OPC is becoming more and more difficult due to the continuous reduction of layout dimensions and diminishing process windows associated with each successive lithographic generation. Lithographers must guarantee high i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::aa5eb6e1d351fbca04f3803c3d71546c
https://hal.archives-ouvertes.fr/hal-00023227
https://hal.archives-ouvertes.fr/hal-00023227
Autor:
Trouiller, Yorick, Farys, Vincent, Borjon, Amandine, Belledent, Jérôme, Couderc, Christophe, Sundermann, Frank, Urbani, Jean-Christophe, Rody, Yves, Gardin, Christian, Planchot, Jonathan, Conley, Will, Goirand, Pierre-Jerome, Warrick, Scott, Robert, Frédéric, Kerrien, Gurwan, Vautrin, Florent, Wilkinson, Bill, Saied, Mazen, Yesilada, Emic, Montgomery, Patrick
Publikováno v:
Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65201D-65201D-12, 12p
Autor:
Lin, Timothy, Robert, Frederic, Borjon, Amandine, Russell, Gordon, Martinelli, Catherine, Moore, Andrew, Rody, Yves
Publikováno v:
Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65202A-65202A-15, 15p
Autor:
Sundermann, Frank, Trouiller, Yorick, Urbani, Jean-Christophe, Couderc, Christophe, Belledent, Jérôme, Borjon, Amandine, Foussadier, Franck, Gardin, Christian, LeCam, Laurent, Rody, Yves, Saied, Mazen, Yesilada, Emek, Martinelli, Catherine, Wilkinson, Bill, Vautrin, Florent, Morgana, Nicolo, Robert, Frederic, Montgomery, Patrick, Kerrien, Gurwan, Planchot, Jonathan
Publikováno v:
Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65330E-65330E-13, 13p
Autor:
Urbani, Jean-Christophe, Chapon, Jean-Damien, Belledent, Jérôme, Borjon, Amandine, Couderc, Christophe, Di-Maria, Jean-Luc, Farys, Vincent, Foussadier, Franck, Gardin, Christian, Kerrien, Gurwan, LeCam, Laurent, Martinelli, Catherine, Montgomery, Patrick, Morgana, Nicolo, Planchot, Jonathan, Robert, Frédéric, Rody, Yves, Saied, Mazen, Sundermann, Frank, Trouiller, Yorick
Publikováno v:
Proceedings of SPIE; Nov2007 Part 2, Issue 1, p66071C-66071C-8, 8p
Autor:
Saied, Mazen, Foussadier, Franck, Belledent, Jérôme, Trouiller, Yorick, Schanen, Isabelle, Yesilada, Emek, Gardin, Christian, Urbani, Jean Christophe, Sundermann, Frank, Robert, Frédéric, Couderc, Christophe, Vautrin, Florent, LeCam, Laurent, Kerrien, Gurwan, Planchot, Jonathan, Martinelli, Catherine, Wilkinson, Bill, Rody, Yves, Borjon, Amandine, Morgana, Nicolo
Publikováno v:
Proceedings of SPIE; Nov2007, Issue 1, p673050-673050-11, 11p
Autor:
Borjon, Amandine, Belledent, Jerome, Trouiller, Yorick, Lucas, Kevin, Couderc, Christophe, Sundermann, Frank, Urbani, Jean-Christophe, Rody, Yves, Gardin, Christian, Foussadier, Frank, Schiavone, Patrick
Publikováno v:
Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61544D-61544D-11, 11p