Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Borisko, S. V."'
Autor:
Tseluyko, A. F., Valentine Lazurik, Ryabchikov, D. L., Hassanein, A., Borgun, I. V., Sereda, I. N., Borisko, S. V.
Publikováno v:
Scopus-Elsevier
In the paper the level of high-current pulse discharge plasma influence on the chamber wall is carried out, that is important for position choosing of the nanolithographer first collecting mirror with gas-discharge radiation source. In the high-curre
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::05409547eb51dfae43d27bcdde8eb680
http://dspace.nbuv.gov.ua/handle/123456789/90952
http://dspace.nbuv.gov.ua/handle/123456789/90952
Publikováno v:
AIP Conference Proceedings; 2006, Vol. 812 Issue 1, p341-344, 4p
