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pro vyhledávání: '"Boris V. Kamenev"'
Autor:
Michael J. Darwin, Gregory Riou, Kevin R. Winstel, Catherine Tempesta, Emily R. Kinser, Mariam Sadaka, Robert Sachs, Gweltaz Gaudin, Boris V. Kamenev, Ionut Radu, Robert Hannon, Didier Landru
Publikováno v:
3DIC
This article reports the capability and the recent development of optical profilometry for monitoring 3D integrated circuits. In particular, the capability to profile transparent film stacks, which was quite challenging, is now accessible with the Un