Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Boris Arnold Rottwinkel"'
Autor:
Jozef Vincenc Oboňa, Lukáš Hladík, Martin Burán, Boris Arnold Rottwinkel, Michael Krause, Tomáš Borůvka, Rodrigo Delgadillo Blando, Scott Fuller
Publikováno v:
International Symposium for Testing and Failure Analysis.
This paper presents a large-volume workflow for fast failure analysis of microelectronic devices. The workflow incorporates a stand-alone ps-laser ablation tool and a FIB-SEM system. As implemented, the picosecond laser is used to quickly remove larg
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9778c408985b55ef0fd40c71cd9480a2
https://doi.org/10.31399/asm.cp.istfa2021p0283
https://doi.org/10.31399/asm.cp.istfa2021p0283
Autor:
Thomas Höche, Boris Arnold Rottwinkel, Henry Spott, Michael Krause, Georg Schusser, André Kreutzer
Publikováno v:
Microscopy Today. 27:40-44
Preparation of electron-transparent thin specimens can be costly in terms of time and is often challenging. Materials and products are becoming more complex, and device components are getting smaller each year. On the other hand, analysis and diagnos
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5008eae00d638a4aa9e2657600d5335b
https://doi.org/10.1017/s1551929519001020
https://doi.org/10.1017/s1551929519001020