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pro vyhledávání: '"Boonzaayer, Martin"'
Autor:
Johnson, Shane, Kuo, Chau-Hong, Boonzaayer, Martin, Braun, Wolfgang, Koelle, Ulrich, Zhang, Yong-Hang, Roth, John
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1998, Vol. 16 Issue 3, p1502-1506, 5p