Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Bong-Ryoul Choi"'
Autor:
Stephen Hsu, Byung-Il Choi, Bong-Ryoul Choi, Xiaofeng Liu, Howell Rafael C, Pil-Soo Kang, Keith Gronlund, Suk-Ju Lee, Sung-Woon Park, Jong-Du Kim, No-Young Chung, Ki-Ho Baik, Na-Rae Bang
Publikováno v:
SPIE Proceedings.
As patterns shrink to physical limits, advanced Resolution Enhancement Technologies (RET) encounter increasing challenges to ensure a manufacturable Pr ocess Window (PW). Moreover, due to the wide variety of pattern constructs for logic device layers
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::851170fb02b4025650ab129e8be369d6
https://doi.org/10.1117/12.2047077
https://doi.org/10.1117/12.2047077
Autor:
Jinyoung Choi, Daejin Park, Donggyu Yim, Cheol-Kyun Kim, Hyoung-Soon Yune, Jaeseung Choi, Bong-Ryoul Choi
Publikováno v:
SPIE Proceedings.
Recently, the dramatic acceleration in dimensional shrink of DRAM memory devices has been observed. For sub 60 nm memory device, we suggest the following method of optical proximity correction (OPC) to enhance the critical dimension uniformity (CDU).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d02613633d2f7f63c8e0dabd6cb9af09
https://doi.org/10.1117/12.804660
https://doi.org/10.1117/12.804660
Autor:
Stefan Jank, Vlad Temchenko, Paul G Karakatsanis, Ramana Veerasingam, Rakesh Vallishayee, Christoph Dolainsky, Xiaojing Yang, Bong-Ryoul Choi, Youval Nehmadi, Moshe Poyastro
Publikováno v:
2006 IEEE International Symposium on Semiconductor Manufacturing.
Deploying OPC that is robust over the process window is becoming more and more challenging as geometries shrinki ii. This challenge has a major impact in time-to-market and yield of new products. This paper describes a litho simulator calibration flo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::56a01e026546abbce896b8fd6d594b4a
https://doi.org/10.1109/issm.2006.4493134
https://doi.org/10.1109/issm.2006.4493134
Autor:
S. Oberholzer, C. Hoffmann, Tatsushi Akazaki, Takis Kontos, Christian Schönenberger, Hideaki Takayanagi, A. E. Hansen, Wolfgang Belzig, Bong-Ryoul Choi
Publikováno v:
Physical Review B. 72
We have measured the conductance and shot-noise of superconductor-normal metal (S-N) junctions between a Niobium (Nb) film and a 2-dimensional electron gas (2DEG), formed in an InAs-based semiconductor heterostructure. Adjacent to the junction, the 2
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::191195649b15b249208eca6eae55010a
https://doi.org/10.1103/physrevb.72.024501
https://doi.org/10.1103/physrevb.72.024501