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Publikováno v:
Журнал інженерних наук, Vol 10, Iss 1, Pp F1-F6 (2023)
Theoretical studies of physical processes and phenomena in the zone of physical interaction of nanoinstruments with the surfaces of elements of microsystem technology are carried out in work. Based on the conducted research, mathematical models of en
Externí odkaz:
https://doaj.org/article/f3cb306699d147828555daed28131853