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Autor:
Gianluca Gazzola, Doh-Soon Kwak, Dong Min Kim, Seung Hoon Tong, Bokeon Kim, Myong-Kee Jeong, Jeongsub Choi
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 31:343-355
We introduce integrated multi-stage importance assessment (IMSIA), a method for the assessment of stage importance in multi-stage processes (MSPs) characterized by a hierarchy of relationships between stages. The importance measured by IMSIA may be u