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pro vyhledávání: '"Boher, Pierre"'
Fast characterization of 2-dimensional gratings is demonstrated using a Fourier lens optical system and a differential optimization algorithm. It is shown that both the grating specific parameters such as the basis vectors and the angle between them
Externí odkaz:
http://arxiv.org/abs/1509.07623
Publikováno v:
In Journal of Non-Crystalline Solids May 2002 303(1):167-174
Publikováno v:
In Surface & Coatings Technology 2002 151:144-150
Autor:
Paret, Valérie ∗, Boher, Pierre, Geyl, Roland, Vidal, Bernard, Putero-Vuaroqueaux, Magali, Quesnel, Etienne, Yves Robic, Jean
Publikováno v:
In Microelectronic Engineering 2002 61:145-155
Publikováno v:
SID Symposium Digest of Technical Papers; Aug2020, Vol. 51 Issue 1, p1445-1448, 4p
Autor:
Boher, Pierre, Evrard, Patrick, Piel, Jean Philippe, Defranoux, Christophe, Stehle, Jean Louis
Publikováno v:
Solid State Technology. Jul2001, Vol. 44 Issue 7, p165. 6p. 7 Graphs.
Publikováno v:
In Applied Surface Science 1999 138:199-205
Publikováno v:
Proceedings of SPIE; 11/28/2017, Vol. 10556, p1-11, 11p
Autor:
Boher, Pierre, Leroux, Thierry
Publikováno v:
SID Symposium Digest of Technical Papers; Jun2019, Vol. 50 Issue 1, p1210-1213, 4p
Publikováno v:
Journal of Applied Physics; 12/15/1990, Vol. 68 Issue 12, p6133, 10p