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Publikováno v:
IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168).
First, a brief presentation of the principles behind laser interferometry based in-situ endpoint detection is made, including the underlying theory of operation, system architecture and filtering methodology. This is followed by experimental data tak
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dc35cef1549db6921bf293227bc21947
https://doi.org/10.1109/asmc.1998.731624
https://doi.org/10.1109/asmc.1998.731624
