Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Bobaro Chang"'
Autor:
Seohyeong Jang, Jinwoo Sung, Bobaro Chang, Taeyup Kim, Hyoungho Ko, Kyo-in Koo, Dong-il (Dan) Cho
Publikováno v:
Sensors, Vol 18, Iss 10, p 3304 (2018)
Silicon nanowires (SiNWs) have received attention in recent years due to their anomalous piezoresistive (PZR) effects. Although the PZR effects of SiNWs have been extensively researched, they are still not fully understood. Herein, we develop a new m
Externí odkaz:
https://doaj.org/article/14c8b7ee7a5146a8a7a1d2ef55cf13ff
Publikováno v:
2023 International Conference on Electronics, Information, and Communication (ICEIC).
Publikováno v:
2019 19th International Conference on Control, Automation and Systems (ICCAS).
This paper presents a design and fabrication process flow of silicon nanowire (SiNW)-based micro-electro-mechanical system (MEMS) microphones. A MEMS microphone has many advantages such as high sensitivity, small package size, and low cost compared w
Autor:
Hyoungho Ko, Jinwoo Sung, Bobaro Chang, Dong-il Dan Cho, Taeyup Kim, Kyo-in Koo, Seohyeong Jang, Seung-Hyun Lee
Publikováno v:
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).
Silicon nanowire (SiNW) has received great attention in sensing applications because of its outstanding piezoresistive (PZR) effects. However, the difficulty of integrating SiNWs and sensor structures has hindered the development of various SiNW-base
Autor:
Taeyup Kim, Seohyeong Jang, Kyo-in Koo, Jinwoo Sung, Dong-il Dan Cho, Bobaro Chang, Hyoungho Ko
Publikováno v:
Sensors (Basel, Switzerland)
Sensors
Volume 18
Issue 10
Sensors, Vol 18, Iss 10, p 3304 (2018)
Sensors
Volume 18
Issue 10
Sensors, Vol 18, Iss 10, p 3304 (2018)
Silicon nanowires (SiNWs) have received attention in recent years due to their anomalous piezoresistive (PZR) effects. Although the PZR effects of SiNWs have been extensively researched, they are still not fully understood. Herein, we develop a new m