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Publikováno v:
Oxide-based Materials and Devices X.
Ultra-wide bandgap zinc gallium oxide (ZGO) and GO films were prepared on c-plane sapphire by conventional radio-frequency magnetron sputtering. In the current sputtered oxide studies, target composition or growth temperature is usually the main depo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0b3fb13c8da1f712776b9216dcff9bbf
https://doi.org/10.1117/12.2511340
https://doi.org/10.1117/12.2511340
