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pro vyhledávání: '"Bo-Jau Tsau"'
Autor:
Shu-Ping Fang, Ted Dziura, Steven Fu, Benjamin Szu-Min Lin, Chih-Chung Huang, Regina Freed, Bo-Jau Tsau, Mike Yeh, Mike D. Slessor, Jay Chih-Chieh Chen
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XVIII.
A small notch or foot existing at the bottom of a polysilicon gate is a common issue for etching processes. The small notch or foot could have a major impact on the length of the polysilicon gate, and the performance of the device would then be impac
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e7e992ad2e0dcebbe74dd18622847a4e
https://doi.org/10.1117/12.536269
https://doi.org/10.1117/12.536269
Autor:
Yeh, Mike, Shu-Ping Fang, Bo-Jau Tsau, C. C. Huang, Lin, Benjamin, Fu, Steven, Chen, Jay, Freed, Regina, Dziura, Ted, Slessor, Mike
Publikováno v:
Solid State Technology. Jul2005, Vol. 48 Issue 7, p6-6. 1/3p.