Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Bleeker, Arno"'
Autor:
Ben Yishai, Michael, Finders, Jo, Kazinczi, Robert, Bleeker, Arno, Luehrmann, Paul, Janssen, Ingrid, Duray, Frank, Shoval, Lior, Couderc, Christophe, Piech, Rich, Hillel, Noam, Englard, Ilan
Publikováno v:
Proceedings of SPIE; Nov2008 Part 2, Issue 1, p70283H-70283H-11, 11p
Autor:
Sandstrom, Tor, Bleeker, Arno, Hintersteiner, Jason, Troost, Kars, Freyer, Jorge, van der Mast, Karel
Publikováno v:
Proceedings of SPIE; Nov2004, Issue 1, p777-787, 11p
Application of rigorous electromagnetic simulation to SLM-based maskless lithography for 65-nm node.
Autor:
Croffie, Ebo H., Eib, Nick, Callan, Neal P., Baba-Ali, Nabila, Latypov, Azat, Hintersteiner, Jason, Sandstrom, Torbjorn, Bleeker, Arno, Cummings, Kevin D.
Publikováno v:
Proceedings of SPIE; Nov2003, Issue 1, p842-850, 9p
Autor:
Moonen, Daniel, Leunissen, Peter L. H. A., de Jager, Patrick W., Kruit, Pieter, Bleeker, Arno J., Van der Mast, Karel D.
Publikováno v:
Proceedings of SPIE; Nov2002, Issue 1, p932-943, 12p
Publikováno v:
Journal of Micro/Nanolithography, MEMS & MOEMS; Jan2005, Vol. 4 Issue 1, p011003-011003-15, 15p
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1993, Vol. 11 Issue 6, p2352-2356, 5p
Publikováno v:
Ultramicroscopy; August 1996, Vol. 64 Issue: 1-4 p17-34, 18p
An imaging apparatus comprising: a radiation system for providing a projection beam of radiation; a support structure for supporting programmable patterning means, the programmable patterning means serving to pattern the projection beam according to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=epopatstat__::03cb0074244feb35cb01987b5522d40a
https://register.epo.org/application?number=EP0213399
https://register.epo.org/application?number=EP0213399