Examination of electron field emission efficiency and homogeneity from CVD carbon-type films.

Autor: Biyablin, A.A., Kandidov, A.V., Pilevskiy, A.A., Rakhimov, A.T., Samorodov, V.A., Seleznev, B.V., Suetin, N.V., Timofeyev, M.A.

Publikováno v: Eleventh International Vacuum Microelectronics Conference IVMC'98 (Cat No98TH8382); 1998, p234-235, 2p