Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Biswaijit Mukhopadhyay"'
Publikováno v:
Sensors, Vol 15, Iss 8, Pp 20305-20315 (2015)
In this paper we present and discuss two innovative liquid-free SOI sensors for pressure measurements in harsh environments. The sensors are capable of measuring pressures at high temperatures. In both concepts media separation is realized using a st
Externí odkaz:
https://doaj.org/article/949f8eafcdca4dd5800c450f053f2811
Publikováno v:
Procedia Engineering. 87:720-723
In this paper we present a high reliable, accurate and safe, solid state pressure sensor for high temperature applications. The sensor is based on an unique fluid-free technology using a piezoresistive SOI-based chip enclosed in a sealed metal housin
Publikováno v:
Sensors
Volume 15
Issue 8
Pages 20305-20315
Sensors, Vol 15, Iss 8, Pp 20305-20315 (2015)
Sensors (Basel, Switzerland)
Volume 15
Issue 8
Pages 20305-20315
Sensors, Vol 15, Iss 8, Pp 20305-20315 (2015)
Sensors (Basel, Switzerland)
In this paper we present and discuss two innovative liquid-free SOI sensors for pressure measurements in harsh environments. The sensors are capable of measuring pressures at high temperatures. In both concepts media separation is realized using a st
Autor:
M. Fritz, Ha-Duong Ngo, T. C. Vu, Biswaijit Mukhopadhyay, Klaus-Dieter Lang, Piotr Mackowiak, Oswin Ehrmann
Publikováno v:
SPIE Proceedings.
Design, simulation, fabrication, and characterization of novel MEMS pressure sensors with new back-side-direct-exposure packaging concept are presented. The sensor design is optimized for harsh environments e.g. space, military, offshore and medical
Autor:
Volker Dipl Phys Schlichting, Ernst Obermeier, Andrea Giuliani, Domenico Arancio, Biswaijit Mukhopadhyay, Klaus-Dieter Lang, Lionello Drera, Vu Cong Thanh, Peter Mackowiak, Ha-Duong Ngo
Publikováno v:
2012 IEEE Sensors.
In this paper a novel liquid-free, piezoresistive pressure sensor on SOI-basis (Silicon On Insulator) for high temperature applications is presented. The sensor is capable of measuring pressures at temperature up to 400 °C (constant load) with an ac