Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Birger Berghoff"'
Autor:
Dirk König, Daniel Hiller, Noël Wilck, Birger Berghoff, Merlin Müller, Sangeeta Thakur, Giovanni Di Santo, Luca Petaccia, Joachim Mayer, Sean Smith, Joachim Knoch
Publikováno v:
Beilstein Journal of Nanotechnology, Vol 9, Iss 1, Pp 2255-2264 (2018)
Impurity doping of ultrasmall nanoscale (usn) silicon (Si) currently used in ultralarge scale integration (ULSI) faces serious miniaturization challenges below the 14 nm technology node such as dopant out-diffusion and inactivation by clustering in S
Externí odkaz:
https://doaj.org/article/3bd003cc63f146c3a3bfcbbacadb1276
Autor:
Dirk, König, Michael, Frentzen, Noël, Wilck, Birger, Berghoff, Igor, Píš, Silvia, Nappini, Federica, Bondino, Merlin, Müller, Sara, Gonzalez, Giovanni, Di Santo, Luca, Petaccia, Joachim, Mayer, Sean, Smith, Joachim, Knoch
Publikováno v:
ACS applied materialsinterfaces. 13(17)
Impurity doping in silicon (Si) ultra-large-scale integration is one of the key challenges which prevent further device miniaturization. Using ultraviolet photoelectron spectroscopy and X-ray absorption spectroscopy in the total fluorescence yield mo