Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Bertrand Vissouvanadin Soubaretty"'
Autor:
Peter Verheyen, Andriy Hikavyy, Bertrand Vissouvanadin Soubaretty, Yasutoshi Okuno, Frederik Leys, Pierre Tomasini, R. Wise, Vladimir Machkaoutsan, Luc Geenen, Roger Loo, C. Claeys, Benny Van Daele, J.P. Lu, J.W. Weijtmans, Shawn G. Thomas, Nicole Thomas, Eddy Simoen, Mireia Bargallo Gonzalez
Publikováno v:
ECS Transactions. 11:47-53
This paper reports on the impact of the pre-epi bake conditions on the epitaxial growth of Si1 xGex Source-Drain (S/D) stressors as studied by p-n junction leakage analysis. It has been demonstrated that the presence of impurity-related (O, C) defect
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::54650f1444a348e7aece96b5fd1d4eb5
https://doi.org/10.1149/1.2778649
https://doi.org/10.1149/1.2778649
Autor:
Mireia Bargallo Gonzalez, Nicole Thomas, Eddy Simoen, Peter Verheyen, Andriy Hikavyy, Frederik Leys, Yasutoshi Okuno, Bertrand Vissouvanadin Soubaretty, Roger Loo, C. Claeys, Vladimir Machkaoutsan, Pierre Tomasini, Shawn Thomas, Jiong Ping Lu, J.W. Weijtmans, Rick Wise
Publikováno v:
ECS Meeting Abstracts. :1097-1097
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aed64bc8324149e4f83560a447cac026
https://doi.org/10.1149/ma2007-02/19/1097
https://doi.org/10.1149/ma2007-02/19/1097