Výsledky vyhledávání

DC to Radio-Frequency Characterization of ZrO2 Dielectric for 'Metal-Insulator-Metal' Integrated Capacitors'

Autor: Bertaud, T., Bermond, C., Blonkowski, S., Vallée, Corentin, Lacrevaz, T., Farcy B. Fléchet, A.

Publikováno v: IEEE Transactions on Components, Packaging and Manufacturing Technology
IEEE Transactions on Components, Packaging and Manufacturing Technology, Institute of Electrical and Electronics Engineers, 2012, 2 (3), pp.502-509
IEEE Transactions on Components, Packaging and Manufacturing Technology, 2012, 2 (3), pp.502-509

International audience

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::11122e3498a86fff195931a6134eab23
https://hal.archives-ouvertes.fr/hal-01025008

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Electrical characterization of advanced MIM capacitors with ZrO2 Insulator for high-density packaging and RF applications

Autor: Bertaud, T., Bermond, C., Blonkowski, S., Vallée, Corentin, Lacrevaz, T., Farcy, A., Gros-Jean, M., Fléchet, B.

Publikováno v: IEEE Transactions on Components, Packaging and Manufacturing Technology
IEEE Transactions on Components, Packaging and Manufacturing Technology, Institute of Electrical and Electronics Engineers, 2012, pp.2 (2012) 502-509
IEEE Transactions on Components, Packaging and Manufacturing Technology, 2012, pp.2 (2012) 502-509

International audience

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::75d55a2594cceb77448946ce1b5fac86
https://hal.archives-ouvertes.fr/hal-00777838

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' Caractérisation très large bande des oxydes ZrO2 et TiTaO à permittivité élevée pour la réalisation de capacités MIM RF intégrées '

Autor: Bertaud, T., Bermond, C., Blonkowski, S., Goullet, Antoine, Vallée, Corentin, Farcy, A., Lacrevaz, T., Fléchet, B.

Publikováno v: 17èmes journées nationales micro-ondes
JNM'11
JNM'11, May 2011, Brest, France
XVIIes Journées Nationales Microondes
XVIIes Journées Nationales Microondes, 2011, Brest, France
XVIIe Journées Nationales Microondes
XVIIe Journées Nationales Microondes, 2011, Brest, France

National audience

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::e1d20c9ed2d008afd3898b11a2ad2881
https://hal.archives-ouvertes.fr/hal-01073531

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'Lateral Field Excitation of thickness shear modes in an AlN membrane'

Autor: Gorisse, M., Bertaud, T., Reinhardt, A., Borel, M., Billard, C., Defaÿ, E., Lacrevaz, T., Bermond, C.

Publikováno v: IEEE International Frequency Control Symposium and European Frequency and Time Forum (IFCS 2011)
IEEE International Frequency Control Symposium and European Frequency and Time Forum (IFCS 2011), May 2011, San Francisco, United States

International audience

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::261c6a11e73ba676dcd4f27d20319b84
https://hal.archives-ouvertes.fr/hal-01068868

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