Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Bernd Thüring"'
Autor:
Wim Bouman, Francis Fahrni, Wim de Boeij, Wolfgang Emer, Bernd Thüring, Thilo Pollak, Friso Klinkhamer
Publikováno v:
Optical Microlithography XXXIII.
Even with the large-scale adaption of EUV Lithography to High Volume Manufacturing, numerous device-critical product layers will still be exposed with Immersion Lithography Technology and therefore ZEISS and ASML keep investing in the next generation
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::43df687882430f506c386627e826f01c
https://doi.org/10.1117/12.2552063
https://doi.org/10.1117/12.2552063
Autor:
Bernd Thüring, Reiner Kühnau
Publikováno v:
Mathematische Nachrichten. 79:99-113
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2b77c9b6426ab235b0dfc7700d86a381
https://doi.org/10.1002/mana.19770790109
https://doi.org/10.1002/mana.19770790109