Zobrazeno 1 - 10
of 53
pro vyhledávání: '"Bernd Irmer"'
Publikováno v:
J Micro Nanolithogr MEMS MOEMS
Nanoscale wear affects the performance of atomic force microscopy (AFM)-based measurements for all applications including process control measurements and nanoelectronics characterization. As such, methods to prevent or reduce AFM tip wear is an area
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a4b9f2dd45a59318624ac77fa3951d25
https://europepmc.org/articles/PMC7724968/
https://europepmc.org/articles/PMC7724968/
Autor:
Heon Yul Ryu, Tae Gon Kim, Sang-Joon Cho, Karine Kenis, Ah Jin Jo, Sebastian W. Schmidt, Bernd Irmer, Sang-il Park
Publikováno v:
Solid State Phenomena. 255:304-308
A non-destructive metrology technique for critical dimension of Fin structure is important for better device characterization and development for improving yield. Due to extremely small dimension with high complexity in FinFET a new metrology solutio
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::02f3dfeb05b0524aeabd8cb7a6a70b02
https://doi.org/10.4028/www.scientific.net/ssp.255.304
https://doi.org/10.4028/www.scientific.net/ssp.255.304
Autor:
Ndubuisi G. Orji, Sebastian W. Schmidt, Hiroshi Itoh, Ronald G. Dixson, Peter S. Walecki, Bernd Irmer, Chumei Wang
Publikováno v:
Ultramicroscopy. 162:25-34
In atomic force microscopy (AFM) metrology, the tip is a key source of uncertainty. Images taken with an AFM show a change in feature width and shape that depends on tip geometry. This geometric dilation is more pronounced when measuring features wit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a3bc3821c3026200caefd010c3e07c10
https://doi.org/10.1016/j.ultramic.2015.12.003
https://doi.org/10.1016/j.ultramic.2015.12.003
Autor:
Ahjin Jo, Sebastian W. Schmidt, Ju Suk Lee, Ardavan Zandiatashbar, Sang-il Park, Tom Vanderwayer, Bernd Irmer, Tae-Gon Kim, Sang-Joon Cho, Byoung-Woon Ahn, Soon-Wook Kim
Publikováno v:
2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
We demonstrated fully automated in-line atomic force microscopy (AFM) for local height variation monitoring solution. Two use cases, which are local variation of SADP Fin height and oxide recess height in Fin reveal process and that of Cu nail protru
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::48df4e85940fd8223e3ae5f6aed928a4
https://doi.org/10.1109/asmc.2017.7969242
https://doi.org/10.1109/asmc.2017.7969242
Publikováno v:
Educational Management Administration & Leadership. 42:112-135
Researchers have found that transformational leadership is related to positive outcomes in educational institutions. Hence, it is important to explore constructs that may predict leadership style in order to identify potential transformational leader
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5139e8bbfaeba5e0dfaf5258f6c0fbed
https://doi.org/10.1177/1741143213499255
https://doi.org/10.1177/1741143213499255
Publikováno v:
IndraStra Global.
An increased emphasis on improved governance and accountability and the need to develop organizational agility, in addition to balancing competing stakeholder demands has intensified the focus on management capabilities in the nonprofit sector. Howev
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a105a0f2f102b0fa90c932988f81735d
https://igi.indrastra.com/items/show/26913
https://igi.indrastra.com/items/show/26913
Publikováno v:
Academy of Management Proceedings. 2007:1-6
Change management research has largely ignored the effects of organizational change management history in shaping employee attitudes and behavior. This article develops and tests a model of the effects of poor change management history (PCMH) on empl
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9d93172f357c959be3feb4c80a7fa1e1
https://doi.org/10.5465/ambpp.2007.26518268
https://doi.org/10.5465/ambpp.2007.26518268
Autor:
Aurelien Labrosse, Johann Foucher, Sebastian W. Schmidt, Sebastian Schade, Sandra Bos, Bernd Irmer, Alexandre Dervillé
Publikováno v:
SPIE Proceedings.
In this paper, we present our most recent approach on the extraction of reliable atomic force microscopy (AFM) tip dimensions from scanning electron microscopy (SEM) images in order to answer future requirements on ever shrinking CD AFM tips. We demo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dd79f1e6294989e62ad11f4aa3e5b92e
https://doi.org/10.1117/12.2085977
https://doi.org/10.1117/12.2085977
Publikováno v:
Academy of Management Proceedings. 2002:B1-B6
Evaluation apprehension (the fear that your work or performance may be critiqued) can inhibit knowledge exchange, an essential component of effective knowledge management. The current study examine...
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0446e90cfec8ef91d5ceb6a427608deb
https://doi.org/10.5465/apbpp.2002.7517582
https://doi.org/10.5465/apbpp.2002.7517582
Publikováno v:
Scopus-Elsevier
This study integrated the research streams of computer-mediated communication (CMC) and group conflict by comparing the expression of different types of conflict in CMC groups and face-to-face (FTF) groups over time. The main aim of the study was to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::941e30cb6cabdeef56a3819741567710
https://doi.org/10.1177/104649640203300403
https://doi.org/10.1177/104649640203300403