Microfabrication of Palladium-Silver Alloy Membranes for Hydrogen Separation.

Autor: Hien Duy Tong, Babak, Berenschot, J.W. Ervin, De Boer, Meint J., Gardeniers, J.G.E., Wensink, Henk, Jansen, Henri V., Nijdam, Wietze, Elwenspoek, Miko C., Gielens, F.C., van Rijn, Cees J.M.

Publikováno v: Journal of Microelectromechanical Systems; Oct2003, Vol. 12 Issue 5, p622-629, 8p, 10 Black and White Photographs, 8 Diagrams, 2 Charts, 4 Graphs