Wafer line productivity optimization in a multi-technology multi-part-number fabricator.

Autor: Maynard, D.N., Rosner, R.J., Kerbaugh, M.L., Hamilton, R.A., Bentlage, J.R., Boye, C.A.

Publikováno v: IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference & Workshop (Cat No98CH36168); 1998, p34-42, 9p