Simulation and design of AIN piezoelectric resonator for infrared sensing application utilizing lamb wave mode.

Autor: Ang, Wan Chia, Kropelmcki, Piotr, Benson Randies, Andrew, Gu, Yuandong Alex, Leong, Kam Chew, Tan, Chuan Seng

Publikováno v: 2014 IEEE Ninth International Conference on Intelligent Sensors, Sensor Networks & Information Processing (ISSNIP); 2014, p1-6, 6p