Zobrazeno 1 - 10
of 166
pro vyhledávání: '"Benjamin Y. H. Liu"'
Autor:
Tom Warner, Elton Williams, John C. Stover, W. Murray Bullis, Karen Gildersleeve, Randal K. Goodall, Benjamin Y. H. Liu, Bradley W. Scheer, Keung‐Shan Woo, Howard R. Huff, Dan Hirleman
Publikováno v:
Journal of The Electrochemical Society. 144:243-250
Distinguishing false counts caused by surface microroughness and haze when measuring particles below 0.1 μm has become a significant concern for ultralarge scale integrated (ULSI) product yield. Initial results are presented from an industry-wide, c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::62001462b6faa47257b673ce30826175
https://doi.org/10.1149/1.1837392
https://doi.org/10.1149/1.1837392
Autor:
Francisco J. Romay, Lin Li, Aaron M. Collins, Benjamin Y. H. Liu, William D. Dick, Chris W. Fandrey
Publikováno v:
Aerosol Science and Technology. 50:1320-1326
A novel water-based condensation particle counter has been developed using a patented, single-flow mixing (SFM) condenser that permits a conventional thermal approach of using a hot saturator followed by a cold condenser to activate and grow particle
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8872fccf73025bb35364aad8d696b59c
https://doi.org/10.1080/02786826.2016.1222510
https://doi.org/10.1080/02786826.2016.1222510
Publikováno v:
Aerosol Science and Technology. 50:17-25
A novel instrument has been developed for generating highly monodisperse aerosol particles with a geometrical standard deviation of 1.05 or less. This aerosol generator applies a periodic mechanical excitation to a micro-liquid jet obtained by aerody
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5027e9516fed823e98ab37165dd97007
https://doi.org/10.1080/02786826.2015.1123213
https://doi.org/10.1080/02786826.2015.1123213
Publikováno v:
Aerosol and Air Quality Research. 10:125-139
The Wide-range Particle Spectrometer (WPS™) is a recently introduced commercial instrument with the unique capability to measure size distributions of aerosols from 0.01 to 10 µm in diameter. The instrument includes a Scanning Mobility Spectromete
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f1955ff255bc5a6142f4bc97d04c1948
https://doi.org/10.4209/aaqr.2009.10.0062
https://doi.org/10.4209/aaqr.2009.10.0062
Publikováno v:
Journal of Colloid and Interface Science. 282:46-57
In this paper, we present the development of a method to accurately measure the positive and negative charge distribution of nanosized aerosols using a tandem differential mobility analyzer (TDMA) system. From the series of TDMA measurements, the cha
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ef169042b9f33356297341b48f7abd7f
https://doi.org/10.1016/j.jcis.2004.08.066
https://doi.org/10.1016/j.jcis.2004.08.066
Autor:
Benjamin Y. H. Liu, Bruce R. Forsyth
Publikováno v:
Aerosol Science and Technology. 36:526-535
The microelectronics industry has been concerned about the loss of product yield in its semiconductor wafer processing steps from killer defects caused by the presence and deposition of contaminant particles. Reactant gases used in plasma enhanced ch
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4a9c0d6af3c493c9a3094069bba13829
https://doi.org/10.1080/02786820252883766
https://doi.org/10.1080/02786820252883766
Autor:
Benjamin Y. H. Liu, Bruce R. Forsyth
Publikováno v:
Aerosol Science and Technology. 36:515-525
Understanding the origin and fate of plasma-enhanced chemical vapor deposition (CVD) contaminant particles is a critical issue in semiconductor manufacturing in order to improve thin film deposition on wafer surfaces. Several competing external force
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d6f7a14845a8fe1f6fb36d2ff6f1d606
https://doi.org/10.1080/02786820252883757
https://doi.org/10.1080/02786820252883757
Publikováno v:
Aerosol Science and Technology. 36:217-226
A particle sampler has been developed, built, and tested. The sampler draws ambient air at approximately 300 L/min and then splits the sampled air into a particle-rich sample stream and a particle-depleted, reject stream. The particle-rich stream con
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ea0e1a1e1ded921208dc0e8a90117a6f
https://doi.org/10.1080/027868202753504074
https://doi.org/10.1080/027868202753504074
Publikováno v:
Aerosol Science and Technology. 35:805-814
The typical size distribution of emission particulates is bi-modal in shape with particles in the fine mode (< 2.0 w m) and the coarse mode. An experimental study of pressure drop across industrial gas cleaning filters has been conducted using a part
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dce10065789423d0303e3c30a3443146
https://doi.org/10.1080/027868201753227352
https://doi.org/10.1080/027868201753227352
Publikováno v:
Solid State Phenomena. :259-262
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6477b510a8de5c576bd7141c1acc2ca1
https://doi.org/10.4028/www.scientific.net/ssp.76-77.259
https://doi.org/10.4028/www.scientific.net/ssp.76-77.259