Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Benjamin B. Rossie"'
Autor:
Zhongping Huang, Yusuf Emirov, N. Nguyen, B. Lägel, Zhifeng Ren, J. D. Schumacher, Rudy Schlaf, Benjamin B. Rossie
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XVIII.
We report about our progress in developing a process for the manufacture of carbon nanotube (CNT) atomic force microscopy (AFM) cantilevers. Due to their exceptional mechanical properties, CNT are among the most promising materials for high aspect ra
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1a27dc17a964d6983508419ef6d2d395
https://doi.org/10.1117/12.563239
https://doi.org/10.1117/12.563239
Autor:
Yusuf Emirov, M. M. Beerbom, Rudy Schlaf, Deron A. Walters, Benjamin B. Rossie, Zhifeng Ren, Z. P. Huang
Publikováno v:
SPIE Proceedings.
Carbon nanotubes (CNT) have exceptional mechanical strength at small diameters needed for measuring high aspect ratio features. Manually attached carbon nanotube atomic force microscopy probes have demonstrated exceptional longevity. Unfortunately, d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8fd6541e1ccbd316bed242acd5b11943
https://doi.org/10.1117/12.483759
https://doi.org/10.1117/12.483759
Autor:
Mohammed R. Islam, Benjamin B. Rossie, A. K. Sikder, Zhifeng Ren, Bhavik Metha, J A. Bieber, Terri L. Shofner, Rudy Schlaf, Deron A. Walters, Yusuf Emirov, Michael W. Cresswell, J. Kohlscheen
Publikováno v:
SPIE Proceedings.
Carbon nanotubes (CNT) are among the candidates for atomic force microscopy probes for use in high aspect ratio critical dimension metrology (CDM). Their mechanical strength at small diameters makes them ideal probes for narrow and deep features. The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f7e5fd919422bd55dfdd8cd9d8fb5d80
https://doi.org/10.1117/12.473496
https://doi.org/10.1117/12.473496
Autor:
Jeedigunta S; Nanomaterials and Nanomanufacturing Research Center, University of South Florida, Tampa, FL 33620, USA., Singh MK, Kumar A, Zekri S, Bumgarner J, Rossie B
Publikováno v:
Journal of nanoscience and nanotechnology [J Nanosci Nanotechnol] 2006 Mar; Vol. 6 (3), pp. 640-3.